Surface Profiler
Surface Profilometry and Metrology The KLA-Tencor series of benchtop stylus and optical profilometers offer the most complete range of stylus measurement features to meet the needs of the engineering and research communities. These research-grade stylus surface profilometer products merge surface metrology capability and value with the tool performance expected from KLA-Tencor’s surface profilometer and metrology products. A range of industries, including general scientific and materials research, optoelectronics, and data storage, require stylus surface profilometry and metrology – gauging the measurements of surface topography to either control their processes or research new material characteristics. Typical surface profilometer measurement parameters which we address include surface flatness, surface roughness, curvature, peak-to-valley, asperity, waviness, texture, volume, sphericity, slope, density, stress, bearing ratio, and distance mainly in the micron to nanometer range.
Applications The KLA-Tencor series of benchtop stylus and optical profilometers is capable of addressing a wide range of measurements and applications:
Products Category Stylus Profilometers
P-Series Stylus Profilers
Optical Profilometers
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